molbox RFM

molbloc-L（量程从1E1-L到3E4-L）

molbloc-S（所有量程）

测量更新速率

1秒

1秒

范围

到molbloc满刻度，取决于气体和molbloc压力

取决于校准类型（请参阅molbloc-L量程表）

流量相对于20 kPa到200 kPa绝压（3 psia到30 psia）或20 kPa到200 kPa绝压（7 psia到70 psia）上游

（请参阅molbloc-S量程表）

分辨率

0.01% FS

±0.01%读数

线性

±0.23%读数，蜗轮流量计，从10%到100% FS

±0.023% FS，涡轮流量计江苏顺通，在10% FS以下

±0.25%读数

重复性

±0.1%读数，从10%到100% FS

±0.01% FS，在10% FS以下

±0.1%读数

精确度1

±0.25%读数，从10%到100% FS

±0.025% FS，在10% FS以下

±0.3%读数

预测的稳定度2
（一年期）

±0.15%读数，科隆质量流量计，从10%到100% FS

±0.015% FS，在10% FS以下

读数的±0.2％

测量不确定度3

±0.5%读数，从10%到100% FS

±0.05% FS，在10% FS以下

±0.5%读数，德尔塔巴流量计，从50 kPa到500 kPa，±0.5%流量@

50 kPa从20 kPa到50 kPa

具有微量程选项的molbox RFM

molbloc-L（量程从1E1-L到3E4-L）

molbloc-L（量程仅仅是1E5)

测量更新速率

1秒

1秒

范围

从0到molbloc满刻度，取决于气体和molbloc压力

取决于校准类型（请参阅molbloc-L表格）

从0到molbloc满刻度，气体质量流量计，取决于气体和molbloc压力

取决于校准类型（请参阅molbloc-L表格）

分辨率

0.01% FS，0.001% FS以下

 10% FS

0.01% FS

线性

±0.23%读数，从1%到100% FS；±0.0023% FS，在1% FS以下

±0.25%读数，从5%到100% FS

±0.0125% FS，在5% FS以下

重复性

±0.1%读数，从1%到100% FS

±0.001% FS，在1% FS以下

±0.2%读数，从5%到100% FS

±0.01% FS，在5% FS以下

精确度1

±0.25%读数，从1%到100% FS

±0.0025% FS，在1% FS以下

±0.32%读数，从5%到100% FS

±0.016% FS，在5% FS以下

预测的稳定度2
（一年期）

±0.15%读数，从1%到100% FS

±0.0015% FS，在1% FS以下

±0.2%读数，从5%到100% FS

±0.01% FS，在5% FS以下

测量不确定度3

±0.5%读数，从1%到100% FS

±0.005% FS，高压电磁流量计，在1% FS以下

±0.5%读数，从5%到100% FS

±0.025% FS，在5% FS以下

型号

描述

Molbox RFM

molbox RFM参考流量监控器

包含：

用户手册、校准证书、电源线、(2) molbox RFM到molbloc压线、(1) molbox RFM到molbloc数据线、(2)直通压力快速连接器

5141-100

molbox RFM, molbloc 5E1-L 10 to 100 sccm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E1-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-1K

molbox RFM, molbloc 5E2-L 100 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-10K

molbox RFM, molbloc 5E3-L 1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5141-50K

molbox RFM, molbloc 3E4-L 5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-1K

molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-10K

molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E3-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5142-50K

molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm

Included: 

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 3E4-L laminar flow element 

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

5144-50K

molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm

Included:

·        molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual

·        molbloc 5E2-L and 3E4-L laminar flow elements

·        molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L

·        Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male

配件

描述

MFC-CB控制盒

MFC-CB控制盒

包括：
（2）MFC/MFM连接线套件
校准线
电源线
操作与维护手册
校准报告

针对molbloc/molbo用户的校准辅助软件

molstic-L安装系统

molstic-S安装系统

RFM-RMK

机架安装工具

RFM 02

微量程