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流量测量主机 |
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型 号:molbox RFM |
品 牌:美国FLUKE |
技术指标:用户手册、校准证书、电源线、(2) molbox RFM到molbloc压线、(1) molbox RFM到molbloc数据线、(2)直通压力快速连接器 |
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遵义流量测量主机-molbox RFM-美国FLUKE
molbox RFM是一个辅助单元,可使用molbloc-L层流和molbloc-S声速流元件进行质量流量测量。
molbloc 流量元件通过两个压力连接件和一根数据线连接到 molbox RFM 上。molbox RFM 从 molbloc EEPROM 读取校准数据,并利用其内置的高精度参考压力传感器 (RPT) 测量 molbloc 的上游压力和下游压力。欧姆测量系统读取 molbloc 铂电阻测温仪的电阻,然后由此计算 molbloc 温度。利用存储在 molbox RFM 内存中的 molbloc 校准数据、压力、温度和气体属性,可计算出通过 molbloc 的气流流速。对于 molbloc-L 流量元件,在流量量程 10% FS 以下时,可以选择微量程选项来提高流量测量分辨度和精确度。
molbox RFM 和 molbloc 流量元件应用广泛,适用于需要高精确度测量低气流的测量、测试和校准应用。对于主要考虑结构紧凑、量程可调性高、成本较低的应用来说,molbox RFM 是理想之选。第二种型号 molbox1+ 针对的优先考虑不确定度的应用。要配置质量流量校准系统,请查看随后几页,选择 molbloc 和压力相关校准,以便更好的覆盖您的流量量程和压力状况。molstic 安装系统和 COMPASS® for
molbox 流量校准软件可以帮您完善系统。
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结构紧凑
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molbloc-L 覆盖的流量量程从 1 sccm 到 100 slm,而 molbloc-S 覆盖的流量上限更是达到了 5000 slm
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从 20 种不同的气体中选择
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利用 100:1 可调性实现认证的测量不确定度 ±0.5% 读数
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内部阀门,可实现内置的清洗、泄漏测试和自重支持
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包括求和、取平均值、高值/低值及偏差等高级测量函数
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完善的前面板控制以及 RS232 和 IEEE-488 远程通信
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利用可由用户设置的参考压力和温度状态,测量质量和体积流量
· 流量测量技术指标
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molbox RFM 可测量通过 molbloc 流量元件的流量。molbloc-L 的流量量程、可用工作压力和压力差,或者 molbloc-S 的流量量程、绝压量程,取决于所使用的 molbloc 元件和校准选项。请参阅 molbloc-L 和 molbloc-S 量程表,了解校准和量程详情。
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molbloc-L 量程最高可达 3E4,可通过微量程选项提高在 10% FS 以下时的分辨率和精确度。对于 1E5-L molbloc,必须使用微量程选项才能达到技术指标。
molbox RFM
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molbloc-L(量程从1E1-L到3E4-L)
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molbloc-S(所有量程)
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测量更新速率
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1秒
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1秒
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范围
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到molbloc满刻度,取决于气体和molbloc压力
取决于校准类型(请参阅molbloc-L量程表)
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流量相对于20 kPa到200 kPa绝压(3 psia到30 psia)或20 kPa到200 kPa绝压(7 psia到70 psia)上游
(请参阅molbloc-S量程表)
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分辨率
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0.01% FS
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±0.01%读数
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线性
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±0.23%读数,,从10%到100% FS
±0.023% FS,在10% FS以下
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±0.25%读数
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重复性
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±0.1%读数,从10%到100% FS
±0.01% FS,在10% FS以下
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±0.1%读数
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精确度1
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±0.25%读数,从10%到100% FS
±0.025% FS,在10% FS以下
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±0.3%读数
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预测的稳定度2
(一年期)
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±0.15%读数,从10%到100% FS
±0.015% FS,,在10% FS以下
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读数的±0.2%
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测量不确定度3
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±0.5%读数,从10%到100% FS
±0.05% FS,在10% FS以下
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±0.5%读数,从50 kPa到500 kPa,±0.5%流量@
50 kPa从20 kPa到50 kPa
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具有微量程选项的molbox RFM
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molbloc-L(量程从1E1-L到3E4-L)
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molbloc-L(量程仅仅是1E5)
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测量更新速率
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1秒
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1秒
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范围
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从0到molbloc满刻度,取决于气体和molbloc压力
取决于校准类型(请参阅molbloc-L表格)
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从0到molbloc满刻度,,取决于气体和molbloc压力
取决于校准类型(请参阅molbloc-L表格)
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分辨率
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0.01% FS,0.001% FS以下
10% FS
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0.01% FS
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线性
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±0.23%读数,从1%到100% FS;±0.0023% FS,在1% FS以下
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±0.25%读数,从5%到100% FS
±0.0125% FS,在5% FS以下
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重复性
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±0.1%读数,从1%到100% FS
±0.001% FS,在1% FS以下
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±0.2%读数,从5%到100% FS
±0.01% FS,在5% FS以下
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精确度1
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±0.25%读数,从1%到100% FS
±0.0025% FS,在1% FS以下
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±0.32%读数,从5%到100% FS
±0.016% FS,在5% FS以下
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预测的稳定度2
(一年期)
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±0.15%读数,从1%到100% FS
±0.0015% FS,在1% FS以下
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±0.2%读数,从5%到100% FS
±0.01% FS,在5% FS以下
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测量不确定度3
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±0.5%读数,从1%到100% FS
±0.005% FS,在1% FS以下
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±0.5%读数,从5%到100% FS
±0.025% FS,在5% FS以下
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· molbloc-S(所有量程)
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除了没有微量程以外,其他技术指标与 molbox RFM 相同。只要将 molbox RFM 连接到 molbloc-S 上,就会禁用微量程传感器。
· 1 精确度:包含线性度、迟滞和可重复性。
· 2 预测的稳定度:典型 molbox RFM 和 molbloc 在典型环境下使用时一年内从零到范围值的最大变化情况。由于稳定度只能是一种预测,因此应该根据经验建立特定 molbox RFM 的稳定度。
· 3 测量不确定度:molbox RFM 流量指示相对于通过 molbloc 的流量真值的最大偏差,包括精确度、稳定度和 DHI 校准标准不确定度。molbloc 的测量不确定度技术指标仅适用于使用的是 molbloc 校准过的气体的情况。所有 molbloc 都针对 N2 校准过。其他气体的校准是可选的。并非所有规格的 molbloc 在所有时间,对所有气体都提供 DHI 校准功能。请在订购前检查是否可用。
型号
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描述
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Molbox
RFM
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molbox RFM参考流量监控器
包含:
用户手册、校准证书、电源线、(2)
molbox RFM到molbloc压线、(1) molbox RFM到molbloc数据线、(2)直通压力快速连接器
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5141-100
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molbox RFM, molbloc 5E1-L 10
to 100 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E1-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-1K
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molbox RFM, molbloc 5E2-L 100
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-10K
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molbox RFM, molbloc 5E3-L 1 to
10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5141-50K
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molbox RFM, molbloc 3E4-L 5 to
50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-1K
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molbox RFM-M, molbloc 5E2-L 10
to 1,000 sccm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-10K
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molbox RFM-M, molbloc 5E3-L
0.1 to 10 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E3-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5142-50K
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molbox RFM-M, molbloc 3E4-L
0.5 to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
3E4-L laminar flow element
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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5144-50K
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molbox RFM-M, molblocs 5E2-L
and 3E4-L10 sccm to 50 slm
Included:
· molbox
RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor
with quick connect molbloc pressure lines, molbloc communication cable, line
cord and user manual
· molbloc
5E2-L and 3E4-L laminar flow elements
· molstic-L
mounting system, with fine pressure regulator and an isolation valve and
precise flow metering valve for each molbloc-L
· Tubing
and adaptors to connect gas supply and device under test, including 1/4 in
tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in
BSP male
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通用配件:
配件
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描述
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MFC-CB控制盒
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MFC-CB控制盒
包括:
(2)MFC/MFM连接线套件
校准线
电源线
操作与维护手册
校准报告
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针对molbloc/molbo用户的校准辅助软件
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molstic-L安装系统
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molstic-S安装系统
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RFM-RMK
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机架安装工具
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RFM
02
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微量程
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